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Patent Searching and Data


Title:
SUBSTRATE INSPECTION HEAD AND INSPECTION POSITION CONVERTING ADAPTOR
Document Type and Number:
Japanese Patent JPH04115166
Kind Code:
A
Abstract:

PURPOSE: To attain cost reduction and rapid correspondence without requiring an inspection needle device at every kind of a substrate by positionally converting inspection points not arranged on constant lattice intervals so as to arrange the same on the constant lattice intervals by a position converting adaptor.

CONSTITUTION: Conductive protruding metal spheres 28a - 28s for inspection needles are provided on an inspection needle surface 22 so as to come into contact therewith corresponding to the tip parts of inspection needles and conductive protruding metal spheres 26a - 26s for a substrate are provided on a substrate surface 24 so as to come into contact therewith corresponding to the inspection points of the substrate. When the metal spheres 28a - 28s and the metal spheres 26a - 26s are present at the same position by an inspection position converting adaptor 20, both of them are electrically connected by conductive through-holes and, when both of them are present at different positions, they are electrically connected by the conductive through-holes and conductive patterns. As a result, since the inspection points not arranged on predetermined lattice intervals are positionally converted so as to be present on the predetermined lattice intervals, the inspection points not arranged on the predetermined lattice intervals can be inspected by the inspection needles arranged at the predetermined lattice intervals and cost can be reduced and rapid correspondence can be taken.


Inventors:
BABA YOSHITO
Application Number:
JP23613890A
Publication Date:
April 16, 1992
Filing Date:
September 05, 1990
Export Citation:
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Assignee:
RIIDO AI SHII PII KK
International Classes:
G01R1/06; G01R31/02; (IPC1-7): G01R1/06; G01R31/02
Attorney, Agent or Firm:
Furuya Eiko