To provide a substrate inspection method and device capable of shortening the period required for insulation inspection.

When potential difference is started to be applied to an output section 13, and then a current detection section 13 detects that the current value flowing between the output section and a wiring pattern 21 decreases to a predetermined reference current value or lower, the substrate inspection device determines the insulation between a wiring pattern to which a positive electrode probe 11 is conducted and a wiring pattern to which a negative electrode probe 11 is conducted based on the detected current value by the current detection section. A plurality of reference current values are set as the reference current value for determining the timing of detecting the current value flowing between the output section and the wiring patterns for insulation determination. The plurality of reference current values are used by switch so that a larger reference current value is used as the electric capacitance between the wiring pattern to which the positive electrode probe is conducted and the wiring pattern to which the negative electrode probe is conducted increases.