Title:
SUBSTRATE LOADING DEVICE
Document Type and Number:
Japanese Patent JP3409664
Kind Code:
B
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate loading device capable of sucking and transporting to a specified position substrates to assure loading excellent in loading efficiency.
SOLUTION: A substrate loading device comprises a No.1 substrate transport means 20 which sucks substrates loaded on a substrate preparation means 10 one by one and transports it to the upper part of a substrate loading means 40, a No.2 substrate transport means 30 which sucks substrates loaded on a substrate preparation means 10 one by one and transports it to the upper part of the substrate loading means 40, and a substrate transport control means 50 which controls the operation of the Nos.1 and 2 substrate transport means 20 and 30 to transport substrate 1 so that the No.2 substrate transport means 30 and the substrate 1 sucked by the No.2 substrate transport means 30 are kept untouched with the No.1 substrate transport means 20 and the substrate 1 sucked by the No.1 substrate transport means 20.
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Inventors:
Saito, Teru
Oguchi, Tetsuya
Ishiguro, Hiroyuki
Hoashi, Junichi
Oguchi, Tetsuya
Ishiguro, Hiroyuki
Hoashi, Junichi
Application Number:
JP1997000295217
Publication Date:
March 20, 2003
Filing Date:
October 28, 1997
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
B65G57/04; B65G59/04; H05K13/02; B65G57/02; B65G59/02; H05K13/02; (IPC1-7): B65G57/04; B65G59/04; H05K13/02