Title:
基板載置台，基板処理装置，基板載置台の表面加工方法
Document Type and Number:
Japanese Patent JPWO2008114753
Kind Code:
A
Inventors:
Shusuke Miyoshi
Wood Kazuichi
Wood Kazuichi
Application Number:
JP2008054814W
Publication Date:
September 25, 2008
Filing Date:
March 14, 2008
Export Citation:
Assignee:
Tokyo Electron, Ltd.
International Classes:
H01L21/683; H01L21/3065; H01L21/304
Attorney, Agent or Firm:
Hiroaki Oyama