Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2009070838
Kind Code:
A
Abstract:

To suppress an increase in cycle time in case when a slit nozzle with directionality in the scanning direction is employed.

Two slit nozzles 41a and 41b with directionality in the scanning direction are provided to a bridging structure of the substrate processing apparatus 1. At this time, the slit nozzle 41a is provided in a manner that (+X) direction is coincided with the scanning direction, and the slit nozzle 41b is provided in a manner that (-X) direction is coincided with the scanning direction. When a substrate 90 exists in the (+X) direction of the bridging structure, the bridging structure is moved in the (+X) direction and a resist liquid is discharged from the slit nozzle 41a. On the other hand, when the substrate 90 exists in the (-X) direction of the bridging structure, the bridging structure is moved in the (-X) direction and the resist liquid is discharged from the slit nozzle 41b.


Inventors:
OKADA KOJI
Application Number:
JP2007234154A
Publication Date:
April 02, 2009
Filing Date:
September 10, 2007
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
DAINIPPON SCREEN MFG
International Classes:
H01L21/027; B05C5/02; B05C11/10; B05C13/02
Domestic Patent References:
JP2005230807A2005-09-02
JP2006108287A2006-04-20
JP2007173368A2007-07-05
JP2004223439A2004-08-12
JP2007144325A2007-06-14
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita