Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP7263078
Kind Code:
B2
Abstract:
To improve accuracy for the control of a substrate temperature in substrate processing in which the substrate is processed while being held on a rotary table.SOLUTION: A substrate processing apparatus includes: a rotation driving mechanism configured to rotate a rotary table around a vertical axis, the rotary table holding a substrate; an electric heater provided at the rotary table to be rotated along with the rotary table and configured to heat the substrate; a power receiving electrode provided at the rotary table to be rotated along with the rotary table and electrically connected to the electric heater; a power feeding electrode configured to be contacted with the power receiving electrode to supply drive power to the electric heater via the power receiving electrode; an electrode moving mechanism configured to connect and disconnect the power feeding electrode and the power receiving electrode relatively; a power feeder configured to supply the drive power to the power feeding electrode; a processing cup configured to surround the periphery of the rotary table; at least one processing liquid nozzle configured to supply a processing liquid onto the substrate; a processing liquid supply mechanism configured to supply the processing liquid to the processing liquid nozzle; and a controller configured to control the electrode moving mechanism, the power feeder, the rotation driving mechanism and the processing liquid supply mechanism.SELECTED DRAWING: Figure 2
Inventors:
Morita Satoshi
Azumimoto Masami
Katsuhiro Morikawa
Koichi Mizunaga
Azumimoto Masami
Katsuhiro Morikawa
Koichi Mizunaga
Application Number:
JP2019063375A
Publication Date:
April 24, 2023
Filing Date:
March 28, 2019
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304; B08B3/02; C25D7/12; C25D17/00; C25D17/06; C25D17/08; C25D21/00; C25D21/02; C25D21/10; H01L21/683; H05B3/02; H05B3/68
Domestic Patent References:
| JP2015154063A | ||||
| JP10209023A | ||||
| JP2017118064A | ||||
| JP2005150468A | ||||
| JP2013084655A | ||||
| JP2001250771A |
Attorney, Agent or Firm:
Hiroyuki Nagai
Nakamura Yukitaka
Satoru Asakura
Hideyuki Mori
Nakamura Yukitaka
Satoru Asakura
Hideyuki Mori