Title:
基板処理装置、および、基板処理方法
Document Type and Number:
Japanese Patent JP7330027
Kind Code:
B2
Abstract:
An objective of the present invention is to determine whether a substrate is normally held without requiring a reference image. A substrate processing apparatus comprises: a holding unit holding a substrate; an imaging unit imaging an imaging range including the outer edge of the held substrate at a plurality of locations and outputting a plurality of pieces of image data of the substrate; an extraction unit extracting the outer edge of the substrate from a difference image between the plurality of pieces of image data; and a determination unit determining a holding state of the substrate based on the outer edge of the substrate in the difference image.
Inventors:
Hiroaki Kakuma
Yuji Okita
Eiji Naohara
Tatsuya Masui
Yuichi Dewa
Yuji Okita
Eiji Naohara
Tatsuya Masui
Yuichi Dewa
Application Number:
JP2019166984A
Publication Date:
August 21, 2023
Filing Date:
September 13, 2019
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; G06T7/00; H01L21/027; H01L21/306; H01L21/677
Domestic Patent References:
| JP2013110270A | ||||
| JP2019036634A | ||||
| JP2019149423A | ||||
| JP2003344037A |
Foreign References:
| WO2009031612A1 |
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita
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