Title:
基板処理装置、半導体装置の製造方法及びプログラム
Document Type and Number:
Japanese Patent JP7110483
Kind Code:
B2
Abstract:
There is provided a technique that includes: a boat including plural slots to hold at least one substrate; a process furnace that processes the at least one substrate held in the boat; a boat elevator that raises and lowers the boat; a transfer device that transfers the at least one substrate between plural carriers where the at least one substrate is stored and the boat; and a controller capable of controlling the boat elevator and the transfer device, wherein the controller sets plural positions where the transfer device transfers the at least one substrate to the boat elevator, and select the positions to minimize a number of shifts among the positions of the boat elevator or total time taken during the shifts.
Inventors:
Kenji Shirako
Satoshi Taniyama
Satoshi Taniyama
Application Number:
JP2021508397A
Publication Date:
August 01, 2022
Filing Date:
March 22, 2019
Export Citation:
Assignee:
KOKUSAI ELECTRIC Inc.
International Classes:
H01L21/677
Domestic Patent References:
| JP2003163252A | ||||
| JP10256341A | ||||
| JP2009088349A | ||||
| JP6283502A |
Attorney, Agent or Firm:
Polar Patent Attorney Corporation