To provide a substrate processing apparatus which have a first function to prevent scratched damages or the like, a second function to prevent attaching of contaminations or the like, a third function of uniform processing for an injected processing liquid, further, these processes are realized simply, easily, surely, and automatically.

The substrate processing apparatus 1 is employed in the process of manufacturing a printed wiring board, holds the printed wiring board E with a conveyer 2 having a group of vertically grooved wheels 5, and executes each process by conveying the board without the printed circuit formed face J contacting with the wheels. Further; the group of vertically grooved wheels 5 can be adjusted in vertical distance; and right and left side injection nozzles 3 can be adjusted for injection angle in symmetrically facing arrangement, in vertical position N or slanting position, and at, deviated point from a right- angle position Q.