SUBSTRATE PROCESSING DEVICE AND METHOD - Dainippon Screen Mfg. Co., Ltd.

Title:

SUBSTRATE PROCESSING DEVICE AND METHOD

Document Type and Number:

Japanese Patent JP3619346

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To constantly perform correct control for each lot in a substrate processing device having parallel processing lines.
SOLUTION: A loader L sends a lot end signal in discharging the last substrate (lot end substrate) in each lot. Each processing part sends the lot end signal in carrying the lot end substrate to the next processing part. In a branching device FW, the lot end signal is sent to both lines A, B even in the case where the lot end substrate is carried to the line A, and the lot end substrate is formed in each of the lines A, B. In a totalling device FW, the lot end signal is sent only in carrying the lot end substrate finally passing the totalling device FW to a processing part P4, and the lot end signal before that is nullified.

Inventors:

Seiji Takefuji
Teraoka Hideyuki

Application Number:

JP11551397A

Publication Date:

February 09, 2005

Filing Date:

May 06, 1997

Export Citation:

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