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Title:
SUBSTRATE PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2001135608
Kind Code:
A
Abstract:

To provide a substrate processing device capable of detecting substrates in batch in a plurality of substrate cassettes with a simple structure.

Substrates W in a plurality of shelves in the cassette C mounted on an elevating stage 11 in an underwater loader are detected in batch by a substrate batch detecting unit including a substrate detecting probe P. The substrate batch detecting unit is incorporated in a cassette feed door 5 for opening/closing a cassette feed port 2A. In the closing mode of the cassette feed device 5, the substrate detecting probe P is advanced/retarded in batch with respect to the cassette C. At the elevated position in the opening mode of the door 5, a temporary setting base 70 is provided for temporarily sitting the cassette C. The substrate detecting probe P advances/retards via a window 71 formed around the center of the temporary base 70. At the four corners of the temporary base 70, a guide 72 is provided to regulate the mount position of the cassette C.


Inventors:
OKUNO EIJI
ASA SEKIBUN
Application Number:
JP1999000311436
Publication Date:
May 18, 2001
Filing Date:
November 01, 1999
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG
International Classes:
H01L21/67; H01L21/304; H01L21/68; (IPC1-7): H01L21/304
Attorney, Agent or Firm:
Kawasaki Mio (2 outside)