To solve the problems, such as restraining of increase in the occupancy area, deflection of a substrate or facilitation of maintenance.

In a transfer system for performing transfers between an atmosphere side and a processing chamber 2 via an intermediate chamber 7, substrates are transferred by moving a substrate-holding tool 92 for holding two substrates 9 in a substantially vertically erected state. The system can move the holding tool 92 in the intermediate chamber, in the horizontal second direction perpendicular to a first direction connecting the intermediate chamber 7 to the load lock chamber 11 or the process chamber 2. Two load lock chambers 11 are provided on one side of the intermediate chamber 4, the process chamber 2 is provided on the opposite side thereof, and the system retreats the holding tool 92 in the process chamber 4 to make it withdraw to the load lock chamber 11. A heater 6 is provided in the intermediate chamber 4 to heat the substrates to a prescribed temperature prior to the processing.