Title:
基板処理装置
Document Type and Number:
Japanese Patent JP5362232
Kind Code:
B2
Inventors:
Yoshikazu Kimura
Application Number:
JP2008031760A
Publication Date:
December 11, 2013
Filing Date:
February 13, 2008
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/027; B05C5/02; B05C13/02; G03F7/16; H01L21/304
Domestic Patent References:
| JP6338555A | ||||
| JP10012528A | ||||
| JP11026541A | ||||
| JP11029392A | ||||
| JP2000208586A | ||||
| JP2001351852A | ||||
| JP2003005665A | ||||
| JP2003192127A | ||||
| JP2004273842A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita