Substrate processing device - Brooks Automation Incorporated

Title:

Substrate processing device

Document Type and Number:

Japanese Patent JP5941677

Kind Code:

B2

Inventors:

Horsec Martin
Hoffmeister Christopher
Krufichev Alexander

Application Number:

JP2011539806A

Publication Date:

June 29, 2016

Filing Date:

December 09, 2009

Export Citation:

Assignee:

Brooks Automation Incorporated

International Classes:

H01L21/677; H02K41/03

Domestic Patent References:

Attorney, Agent or Firm:

Motohiko Fujimura

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