Title:
Board processing equipment
Document Type and Number:
Japanese Patent JP6359925
Kind Code:
B2
Abstract:
A substrate processing apparatus includes: a circulation pipe which defines a circulation passage through which a chemical liquid within a chemical-liquid tank is circulated; a supply pipe which guides the chemical liquid from the circulation pipe to a chemical-liquid nozzle; a supply valve which is switched between an open state in which the chemical liquid flowing through the supply pipe toward the chemical-liquid nozzle is passed and a closed state in which the supply of the chemical liquid from the supply pipe to the chemical-liquid nozzle is stopped; a recovery pipe which guides the chemical liquid from a cup to the chemical-liquid tank; and a branch pipe which guides the chemical liquid within the circulation pipe to the recovery pipe.
Inventors:
Iwano Mitsunori
Application Number:
JP2014190106A
Publication Date:
July 18, 2018
Filing Date:
September 18, 2014
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304
Domestic Patent References:
| JP2008130835A | ||||
| JP2013211525A | ||||
| JP3039838A | ||||
| JP2011061034A | ||||
| JP2010040756A | ||||
| JP2008034593A |
Attorney, Agent or Firm:
Patent Business Corporation Ai Patent Office