Title:
基板処理装置及び処理方法
Document Type and Number:
Japanese Patent JP4318011
Kind Code:
B2
Inventors:
Kinoshita Kazuto
Noriya Wada
Kazuhiko Gonmori
Noriya Wada
Kazuhiko Gonmori
Application Number:
JP2000165839A
Publication Date:
August 19, 2009
Filing Date:
June 02, 2000
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G21K5/00; B01J19/12; G02F1/13; G02F1/1333; H01L21/304
Domestic Patent References:
| JP4079325A | ||||
| JP62291034A | ||||
| JP10050646A |
Attorney, Agent or Firm:
Shunji Kagei