Title:
基板処理装置のスケジュール作成方法及びそのプログラム
Document Type and Number:
Japanese Patent JP4979412
Kind Code:
B2
Abstract:
A scheduling method for a substrate treating apparatus having a plurality of treating sections for treating substrates, wherein, based on a recipe including a plurality of treating steps, a controller determines beforehand an order of treating a plurality of lots successively by operating a transport device having a substrate holder for transferring the substrates to transport the lots to the treating sections. When arranging a specific treating step that may be accompanied by dynamic processing, among the treating steps, the controller determines whether the dynamic processing should be allocated before the specific treating step, based on a treating step corresponding to an origin of transportation for a previous specific treating step and a treating step corresponding to an origin of transportation for the specific treating step.
Inventors:
Masahiro Yamamoto
Application Number:
JP2007045571A
Publication Date:
July 18, 2012
Filing Date:
February 26, 2007
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B08B3/04; H01L21/027; H01L21/304
Domestic Patent References:
| JP8236491A | ||||
| JP2000276217A | ||||
| JP2002198414A | ||||
| JP2003031454A |
Attorney, Agent or Firm:
Tsutomu Sugiya
Hiroyuki Todaka
Hiroyuki Todaka