Title:
基板処理装置、半導体装置の製造方法、基板処理方法、および、プログラム
Document Type and Number:
Japanese Patent JP7407153
Kind Code:
B2
Abstract:
An object transfer device includes: a motor; a motor drive circuit; an encoder that detects a motor output shaft rotation angle; a drive system that transmits motion of the output shaft to an object; an origin sensor that detects arrival of a predetermined site of the drive system interlocked with the object at a predetermined position; a drive circuit-including servo amplifier that records a current position of the object based on detection by the encoder and the origin sensor, and controls the object to a target position; an absolute position holder that acquires an absolute position of the predetermined site based on detection by the encoder at least while the drive circuit is off; and a power saving controller that is bidirectionally communicable with the servo amplifier and can resume servo control with the absolute position as a current position of the predetermined site when the drive circuit is on.
Inventors:
Izuyuki Ohta
Application Number:
JP2021138905A
Publication Date:
December 28, 2023
Filing Date:
August 27, 2021
Export Citation:
Assignee:
KOKUSAI ELECTRIC Inc.
International Classes:
H01L21/677; H02P29/00
Domestic Patent References:
| JP10155291A | ||||
| JP63191594A | ||||
| JP2015096005A |
Foreign References:
| CN111026171A |
Attorney, Agent or Firm:
Polaire Patent Attorneys Corporation
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