Title:
基板処理装置及び基板処理方法
Document Type and Number:
Japanese Patent JP4014031
Kind Code:
B2
Inventors:
Taiji Iwashita
Kimiya Sakaguchi
Ichiro Shimomura
Junji Harada
Kimiya Sakaguchi
Ichiro Shimomura
Junji Harada
Application Number:
JP2002163967A
Publication Date:
November 28, 2007
Filing Date:
June 05, 2002
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G03F7/20; H01L21/027; H01L21/677; H01L21/68
Domestic Patent References:
| JP9115816A | ||||
| JP9219349A | ||||
| JP5217886A | ||||
| JP9326359A | ||||
| JP9232231A | ||||
| JP9326358A | ||||
| JP3218619A | ||||
| JP10303097A | ||||
| JP8255738A |
Attorney, Agent or Firm:
Kikuhiko Nakamoto