Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP5448385
Kind Code:
B2
Inventors:
Tsutomu Kikuchi
Application Number:
JP2008196202A
Publication Date:
March 19, 2014
Filing Date:
July 30, 2008
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
H01L21/304; B08B3/02; B08B3/10
Domestic Patent References:
| JP2007288134A | ||||
| JP2007326088A | ||||
| JP58223049A | ||||
| JP4254755A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
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