Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP6487168
Kind Code:
B2
Inventors:
Jiro Okuda
Toyohide Hayashi
Toyohide Hayashi
Application Number:
JP2014198141A
Publication Date:
March 20, 2019
Filing Date:
September 29, 2014
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/306; B05C5/00; B05C11/10; B05D1/40; B05D3/00; B08B3/02; H01L21/027; H01L21/304
Domestic Patent References:
| JP2013172079A | ||||
| JP2009158597A | ||||
| JP2002170803A | ||||
| JP2013187365A | ||||
| JP2013062330A | ||||
| JP2003136015A |
Attorney, Agent or Firm:
Yoshito Fukushima
Masahiro Nakagawa
Sawamura Hideyuki
Masahiro Nakagawa
Sawamura Hideyuki