Title:
基板処理装置及び基板処理装置の基板搬送方法
Document Type and Number:
Japanese Patent JP4610317
Kind Code:
B2
Inventors:
Tatsuya Oki
Application Number:
JP2004352796A
Publication Date:
January 12, 2011
Filing Date:
December 06, 2004
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677
Domestic Patent References:
| JP11102953A | ||||
| JP2000021948A | ||||
| JP2002237507A | ||||
| JP10189687A | ||||
| JP2001351848A | ||||
| JP2000332083A |
Foreign References:
| WO2006057319A1 |
Attorney, Agent or Firm:
Hiroaki Oyama