Title:
基板の処理装置
Document Type and Number:
Japanese Patent JP4887332
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a coater/developer responsive to small-lot processing.SOLUTION: Two-story vacant cassette loading stages 20, 21 and a cassette transfer mechanism 22 are provided above a cassette loading stage 12 of a cassette carry-in-and-out section 10 of a coater/developer. The vacant cassette loading stages 20, 21 are configured not to disturb an up-and-down movement of an external cassette carrying device A. Each vacant cassette loading stage 20, 21 has 4 cassette transfer devices 30 which can transfer the loaded cassette to the next cassette transfer device. A vacant cassette which is carried onto the cassette loading stage 12 by the external cassette carrying device A and after transporting wafers W to a processing station are transferred to the vacant cassette loading stage by a cassette transfer mechanism 22 to store it temporarily. The next cassette is carried in to the empty cassette loading stage 12. The vacant cassette on the vacant cassette loading stage is returned back to the cassette loading stage 12 before wafer processing is completed.
Inventors:
Yuichi Yamamoto
Satoshi Teramoto
Tsukinogi Wataru
Satoshi Teramoto
Tsukinogi Wataru
Application Number:
JP2008137444A
Publication Date:
February 29, 2012
Filing Date:
May 27, 2008
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; H01L21/027
Domestic Patent References:
| JP10270530A | ||||
| JP2006273457A | ||||
| JP2004189361A |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Miaki Kametani
Koji Hagiwara