Title:
基板処理装置
Document Type and Number:
Japanese Patent JP7292249
Kind Code:
B2
Abstract:
A transfer apparatus for transporting substrates in a transfer chamber having a first and second ends and two sides extending between the ends. The transfer apparatus includes a drive section, at least one base arm fixed at one end with respect to the transfer chamber and including at least one arm link rotatably coupled to the drive section and at least one transfer arm rotatably coupled to a common end of the base arm, the at least one transfer arm has two end effectors. The drive section has motors with three independent axes of rotation defining three degrees of freedom. One degree of freedom moves the at least one base arm horizontally for transporting the at least one transfer arm and two degrees of freedom drives the at least one transfer arm to extend and retract the at least one transfer arm and swap the two end effectors.
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Inventors:
Klapy Chef, Alexander
Gilchrist, Ulysses
Caveney, Robert Tea
Babs, daniel
Gilchrist, Ulysses
Caveney, Robert Tea
Babs, daniel
Application Number:
JP2020156696A
Publication Date:
June 16, 2023
Filing Date:
September 17, 2020
Export Citation:
Assignee:
Brooks Automation US, LLC
International Classes:
H01L21/677; B25J9/06
Domestic Patent References:
| JP2004288718A | ||||
| JP3755744B2 | ||||
| JP2000072248A | ||||
| JP2000308984A | ||||
| JP2006205264A | ||||
| JP2001135705A |
Foreign References:
| WO2010080983A2 | ||||
| US20020061248 | ||||
| KR100850436B1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Asahina Patent Office
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