Title:
基板処理方法、基板処理装置および記憶媒体
Document Type and Number:
Japanese Patent JP6444843
Kind Code:
B2
Inventors:
Goshi Gentaro
Application Number:
JP2015209945A
Publication Date:
December 26, 2018
Filing Date:
October 26, 2015
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304
Domestic Patent References:
| JP2014022566A | ||||
| JP2011187570A | ||||
| JP2015176935A | ||||
| JP2012109301A | ||||
| JP2008198741A |
Foreign References:
| WO2007114448A1 |
Attorney, Agent or Firm:
Hiroyuki Nagai
Hirohito Katsunuma
Hideyuki Mori
Hirohito Katsunuma
Hideyuki Mori