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Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4236073
Kind Code:
B2
Inventors:
Kazunori Fujikawa
Kanamoto Kazumi
Application Number:
JP2000296342A
Publication Date:
March 11, 2009
Filing Date:
September 28, 2000
Export Citation:
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Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G02F1/13; H01L21/304; G02F1/1333; H01L21/027; H01L21/306
Domestic Patent References:
JP200058496A
JP2000150349A
JP200177069A
JP10199850A
JP200040683A
Attorney, Agent or Firm:
Takeo Mamiya



 
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