Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4236073
Kind Code:
B2
Inventors:
Kazunori Fujikawa
Kanamoto Kazumi
Kanamoto Kazumi
Application Number:
JP2000296342A
Publication Date:
March 11, 2009
Filing Date:
September 28, 2000
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G02F1/13; H01L21/304; G02F1/1333; H01L21/027; H01L21/306
Domestic Patent References:
JP200058496A | ||||
JP2000150349A | ||||
JP200177069A | ||||
JP10199850A | ||||
JP200040683A |
Attorney, Agent or Firm:
Takeo Mamiya