Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4399222
Kind Code:
B2
Inventors:
Satoshi Taniyama
Satoru Ichimura
Hidenari Yoshida
Satoru Ichimura
Hidenari Yoshida
Application Number:
JP2003334649A
Publication Date:
January 13, 2010
Filing Date:
September 26, 2003
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
F27B5/14; F27B5/04; H01L21/31
Domestic Patent References:
| JP9097767A | ||||
| JP7142418A | ||||
| JP8124869A | ||||
| JP3291917A | ||||
| JP5215463A | ||||
| JP63200329U | ||||
| JP7201767A | ||||
| JP2002009008A | ||||
| JP11283928A | ||||
| JP8045921A |
Attorney, Agent or Firm:
Patent Business Corporation IPS