Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4592787
Kind Code:
B2
Inventors:
Yoshihiro Kawaguchi
Ikki Motomatsu
Ikki Motomatsu
Application Number:
JP2008181131A
Publication Date:
December 08, 2010
Filing Date:
July 11, 2008
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; F26B15/12; H01L21/677
Domestic Patent References:
| JP200976547A | ||||
| JP2008159782A | ||||
| JP2007158088A | ||||
| JP20063036A | ||||
| JP2003188078A |
Attorney, Agent or Firm:
Filial piety Sasaki