To provide a substrate processor capable of reducing cost, shortening carrying time, and increasing the throughput by simplifying the structure of a cassette-carrying portion.
A substrate processor has a cassette-carrying portion 53 having a tilting function for tilting a cassette in the carrying process of a cassette 10. The cassette-carrying portion 53 has a sliding substrate 63 which moves horizontally, a cassette gripper 67 capable of holding the cassette tiltably mounted on the substrate 63, a cam lever 68 rotatably mounted on the substrate 63 and moving working with the cassette gripper 67, a cam plate opposed to the substrate 63 and having a horizontal copy face and a curved copy face, and a switching means 76 for making the cam lever 68 copy one of the copy faces. When the cam lever 68 is made to copy the curved copy face, the cassette 10 is tilted in the carrying process to prevent the substrate 63 from dropping and the cam lever 68 is made to copy the horizontal copy face by the switching means 76, to horizontally keep and carry the cassette 10.
TATENO HIDETO
YANAGAWA HIDEHIRO
TAKEUCHI TSUTOMU
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