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Patent Searching and Data


Title:
SUBSTRATE PROCESSOR
Document Type and Number:
Japanese Patent JP2008004792
Kind Code:
A
Abstract:

To achieve easy transition between a production information screen and a trace data screen.

A system for linking a production information screen with a trace data screen comprises a production information file folder for saving production information files, and a trace data file folder for saving trace data files. The production information filename is composed of a wafer number and the date and time of forming the production information file, and the trace data filename is composed of a wafer number and the date and time of forming the trace data file. Retrieving between the production information filename and the trace data filename enables the transition between the production information screen and the trace data screen.


Inventors:
SHIRAKAWA MASATO
Application Number:
JP2006173405A
Publication Date:
January 10, 2008
Filing Date:
June 23, 2006
Export Citation:
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Assignee:
HITACHI INT ELECTRIC INC
International Classes:
H01L21/02; C23C16/52; G05B19/418; H01L21/027; H01L21/205; H01L21/31
Domestic Patent References:
JP2006128447A2006-05-18
JP2000077290A2000-03-14
JP2002110496A2002-04-12
JPH10312259A1998-11-24
JPH11354398A1999-12-24
Attorney, Agent or Firm:
Kajiwara Tatsuya