Title:
SUBSTRATE PROTECTOR AND METHOD FOR MANUFACTURING SUBSTRATE HAVING FILM
Document Type and Number:
Japanese Patent JP2023088069
Kind Code:
A
Abstract:
To provide a substrate protector capable of enhancing quality uniformity in a functional film, and a method for manufacturing a substrate having a film.SOLUTION: A substrate protector 11 for protecting a first main surface W1a of a substrate W1 includes: a body plate 12 having a size covering the first main surface W1a of the substrate W1; and an attachment member 13 for attaching the substrate W1 to the body plate 12. The attachment member 13 includes an attachment main body 13a arranged between the body plate 12 and the substrate W1 and a projection part 13b projecting to the outside from between the body plate 12 and the substrate W1; the attachment main body 13a including an adhesive layer adhering to the peripheral part of the first main surface W1a of the substrate W1 is not fixed to the body plate 12; and the projection part 13b is fixed to the body plate 12.SELECTED DRAWING: Figure 1
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Inventors:
YAMAZAKI YUSUKE
Application Number:
JP2021202706A
Publication Date:
June 26, 2023
Filing Date:
December 14, 2021
Export Citation:
Assignee:
NIPPON ELECTRIC GLASS CO
International Classes:
C23C14/50; C03C17/34; C23C16/458; H01L21/683
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda