Title:
基板の回収方法と、該回収方法の実施に供する加工後基板回収装置
Document Type and Number:
Japanese Patent JP7343303
Kind Code:
B2
Abstract:
To provide a supply method for substrates to be processed and a collection method for substrates having been processed that make it possible to stock and automatically supply a large quantity of substrates to be processed at a time without damaging substrates by preventing interference between the substrates and a pin and also stack substrates having been processed in quantities so as to improve work efficiency.SOLUTION: At a driving gear conveyor 8 which is a feed/discharge place for substrates 5, 7 to/from a substrate processing device 2, and conveys substrates from one end 8a thereof to the other end 8b, a substrate-before-processing supply device 4, after placing substrates to be processed on a position adjusting mechanism 10 located above it and adjusting positions while laying the substrates held substantially upright gradually down, lowers the position adjusting mechanism onto one end of the driving gear conveyor, and a substrate-after processing recovery device 6 stacks and collects a plurality of substrates having been processed alternately and orthogonally into a substrate-after processing storage device 9 from the other end of the driving gear conveyor.SELECTED DRAWING: Figure 1
Inventors:
Yasuhiko Kanaya
Masuo Yamauchi
Isamu Katagiri
Masuo Yamauchi
Isamu Katagiri
Application Number:
JP2019098164A
Publication Date:
September 12, 2023
Filing Date:
May 26, 2019
Export Citation:
Assignee:
Ofuna Enterprise Japan Co., Ltd.
International Classes:
B23Q7/03; B23B41/00; B23B47/00; B23Q7/00; B23Q7/04; B23Q7/16; B26D7/18; B26D7/32
Domestic Patent References:
| JP48019988B1 | ||||
| JP2002167045A | ||||
| JP63306897A | ||||
| JP11227945A | ||||
| JP11220291A | ||||
| JP2002002695A | ||||
| JP60157712U | ||||
| JP2000042856A | ||||
| JP6506431A |
Foreign References:
| US4867297 |
Attorney, Agent or Firm:
Masahiko Yuasa
Yoshiyuki Fujiki
Yoshiyuki Fujiki