Title:
Substrate removal structure
Document Type and Number:
Japanese Patent JP6352802
Kind Code:
B2
Inventors:
Ryo Hasegawa
Application Number:
JP2014261564A
Publication Date:
July 04, 2018
Filing Date:
December 25, 2014
Export Citation:
Assignee:
NEC Platforms, Ltd.
International Classes:
G06F1/16; H05K7/14
Domestic Patent References:
| JP4188794A | ||||
| JP6077291U | ||||
| JP62047192U | ||||
| JP2011248560A |
Foreign References:
| US5906497 |
Attorney, Agent or Firm:
Masahiko Desk
Naoki Shimosaka
Naoki Shimosaka
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