Title:
SUBSTRATE ROTATION TYPE COATING APPARATUS
Document Type and Number:
Japanese Patent JP2003024863
Kind Code:
A
Abstract:
To provide an apparatus in which a cotton candy like resist stuck on the whole surface of a flow straightening plate is completely wash out with a cleaning liquid.
A plurality of rinse liquid flow out ports 12 are provided on the upper end part surface of the flow straightening plate 10 and a plurality of liquid introducing grooves 20 are provided to communicate with each rinse flow out port through the whole periphery of the flow straightening plate. A rinse liquid flowing out to the upper end part surface of the flow straightening plate from the rinse liquid flow out ports is led toward the outer peripheral end of the flow straightening plate by the liquid introducing grooves.
Inventors:
Kaneoka, Masa
Application Number:
JP2001000219937
Publication Date:
January 28, 2003
Filing Date:
July 19, 2001
Export Citation:
Assignee:
DAINIPPON SCREEN MFG CO LTD
International Classes:
G03F7/30; B05C11/08; B05C11/10; G03F7/30; B05C11/08; B05C11/10; (IPC1-7): B05C11/08; B05C11/10; G03F7/30
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