Title:
SUBSTRATE ROTATION TYPE TREATING APPARATUS
Document Type and Number:
Japanese Patent JP11040490
Kind Code:
A
Abstract:
To facilitate the maintenance work by making at least a spin chuck, substrate rotator mechanism and cup freely drawable in the horizontal direction together from a treating liq. feeder unit.
A slide board 52 mounts a spin unit 10 and has a pair of mutually parallel slide members 54 fixed to the bottom face of the board 52 which is guided, when being drawn to this side, by two guide rails 62 to move parallel in the horizontal direction so as to permit a spin chuck 16 of the spin unit 10, rotary pivot, motor and cup 22 to be drawn to this side of a spin coater. The top face of a drain recovery box is lower than the lowest position of a drain piping and exhaust hose 50 is freely bendable and hence the spin unit 10 can be drawn out.
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Inventors:
Nishimura, Joichi
Otani, Masami
Imanishi, Yasuo
Tsuji, Masao
Iwami, Masaki
Morita, Akihiko
Otani, Masami
Imanishi, Yasuo
Tsuji, Masao
Iwami, Masaki
Morita, Akihiko
Application Number:
JP1997000205376
Publication Date:
February 12, 1999
Filing Date:
July 14, 1997
Export Citation:
Assignee:
DAINIPPON SCREEN MFG CO LTD
International Classes:
B05C11/08; H01L21/027; H01L21/304; B05C11/08; H01L21/02; (IPC1-7): H01L21/027; B05C11/08; H01L21/304