Title:
SUBSTRATE SEPARATION SYSTEM
Document Type and Number:
Japanese Patent JP2007075964
Kind Code:
A
Abstract:
To prevent a substrate having a formed scribe line from being separated while it is conveyed.
A third substrate support unit where a bonded mother substrate having the formed scribe line is mounted, and which conveys the mounted bonded mother substrate, is composed of four belt conveyors 31. Respective belt conveyors 31 have a flat belt wound on a drive pulley 31a and a driven pulley 31b. The bonded mother substrate mounted on respective flat belt 31c is stably conveyed to the separation unit.
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Inventors:
NISHIO JINKO
OSHIMA YUKIO
OSHIMA YUKIO
Application Number:
JP2005268788A
Publication Date:
March 29, 2007
Filing Date:
September 15, 2005
Export Citation:
Assignee:
MITSUBOSHI DIAMOND IND CO LTD
International Classes:
B26D7/08; C03B33/03; G02F1/13; G02F1/1333
Domestic Patent References:
| JPH04345426A | 1992-12-01 | |||
| JPS5869733A | 1983-04-26 |
Foreign References:
| WO2005053925A1 | 2005-06-16 | |||
| WO2005028172A1 | 2005-03-31 | |||
| WO2004048057A1 | 2004-06-10 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita