Title:
基板静電気除去装置及び方法
Document Type and Number:
Japanese Patent JP6452947
Kind Code:
B2
Abstract:
Provided are an apparatus and method for removing static electricity from a substrate. The apparatus includes: a vacuum chamber; a substrate stage which is installed inside the vacuum chamber; and a first electrode and a second electrode which are installed inside the vacuum chamber and physically separated from the substrate stage, wherein an electric field is formed between the first electrode and the second electrode by different voltages applied to the first electrode and the second electrode, and at least part of the substrate stage is placed within the electric field.
Inventors:
Lee Dong Ho
Application Number:
JP2014071304A
Publication Date:
January 16, 2019
Filing Date:
March 31, 2014
Export Citation:
Assignee:
Samsung Display Co.,Ltd.
International Classes:
H05F3/04; H01T19/00
Domestic Patent References:
| JP2003059693A | ||||
| JP2003142228A | ||||
| JP2006351454A | ||||
| JP2007115559A | ||||
| JP2005158499A |
Foreign References:
| US20080247114 |
Attorney, Agent or Firm:
Kyosei International Patent Office
Yoshifumi Saeki
Takashi Watanabe
Yoshifumi Saeki
Takashi Watanabe
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