To provide a substrate sticking device which has a simple mechanism and makes it excellent to handle substrates.

The substrate sticking device has an upper table unit 19 which suctionally holds an upper substrate to be processed and a lower table unit 14 which suctionally holds a lower substrate to be processed. The upper table unit can have its suctional holding surface turned over and rotated and is supported to face the lower table unit when turned over, and the lower table unit can be elevated and lowered.