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Title:
SUBSTRATE STORAGE CONTAINER, AND PACKAGE FOR SUBSTRATE STORAGE CONTAINER
Document Type and Number:
Japanese Patent JP2012240703
Kind Code:
A
Abstract:

To provide a substrate storage container and a package for the substrate storage container by which packing/unpacking work can easily be performed and furthermore a substrate can be prevented from being contaminated even when an outside air temperature changes.

The substrate storage container 1 includes a container body 4 for housing the substrate and a lid body for closing the opening of the container body 4. On the external surfaces of the upper wall 7 and side walls 9 of the container body 4, heat-insulating walls 31, 32, and 33 for covering the external surfaces and suppressingi thermal conduction between the outside and inside of the container body 4, are installed. In addition, by adding heat-insulating walls 34, 35, and 36 for covering the lid body, a back surface wall 8, and a bottom plate 11, the package for the substrate storage container can also be formed with six heat-insulating walls in total.


Inventors:
IGARASHI MASANORI
WATANABE NAOTO
Application Number:
JP2011112112A
Publication Date:
December 10, 2012
Filing Date:
May 19, 2011
Export Citation:
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Assignee:
SHINETSU POLYMER CO
International Classes:
B65D85/86; B65D81/38; H01L21/673
Attorney, Agent or Firm:
Tomohiro Sakamoto



 
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