Title:
SUBSTRATE STORAGE CONTAINER
Document Type and Number:
Japanese Patent JP2005256983
Kind Code:
A
Abstract:
To provide a loosening preventing means to a threaded member employed to fasten to a substrate storage container such a mounting member mounted in a substrate storage container as a mounting member for transport and a bottom plate for positioning in a substrate machining device.
The substrate storage container is a substrate storage container consisting of a container body 1 and a lid 2. A mounting member 6 mounted in the substrate storage container by a threaded member 3 is fastened through the medium of a loosening preventing means provided to respective surfaces with which the threaded member (a male screw) 3 and the mounting member 6 are brought into contact.
Inventors:
TODA JUNYA
NAKAYAMA TAKAYUKI
NAKAYAMA TAKAYUKI
Application Number:
JP2004070470A
Publication Date:
September 22, 2005
Filing Date:
March 12, 2004
Export Citation:
Assignee:
SHINETSU POLYMER CO
International Classes:
B65D85/86; F16B35/06; F16B39/24; F16B39/282; F16B43/00; H01L21/673; H01L21/68; (IPC1-7): F16B39/282; B65D85/86; F16B39/24; F16B43/00; H01L21/68
Attorney, Agent or Firm:
Kanji Arai
Naotaka Kono
Eiichiro Shimazaki
Naotaka Kono
Eiichiro Shimazaki