SUBSTRATE STORAGE CONTAINER - SHINETSU POLYMER CO

Title:

SUBSTRATE STORAGE CONTAINER

Document Type and Number:

Japanese Patent JP2009246154

Kind Code:

A

Abstract:

To provide a substrate storage container such that a housing member stored and held in a through-hole of the substrate storage container does not allow a threaded portion for fixation to loosen in spite of acceleration and vibration during transportation and storage and thermal hysteresis during cleaning and drying.

The substrate storage container 1 has a container body storing a substrate and a lid body closing an opening thereof, and is provided with a through-hole linking the inside and outside of the container body to each other. The housing member storing and holding a venting member with a filter in the through-hole is fitted to the substrate storage container through rotation in a rotating direction, and a means of preventing the housing member from being loosened in the rotating direction is provided thereto.

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Inventors:

HOSOI MASATO

Application Number:

JP2008091214A

Publication Date:

October 22, 2009

Filing Date:

March 31, 2008

Export Citation:

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Assignee:

SHINETSU POLYMER CO

International Classes:

H01L21/673; B65D85/86; F16B9/02; F16B39/32; F16K15/08; G03F1/66; H01L21/027

Domestic Patent References:

JP2004146676A	2004-05-20
JP2008066330A	2008-03-21
JP2004179449A	2004-06-24
JP2005256983A	2005-09-22
JP2002031120A	2002-01-31
JPS5863417A	1983-04-15

Attorney, Agent or Firm:

Naotaka Kono
Kanji Arai
Eiichiro Shimazaki
Akiko Ishii

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