Substrate stowage container - Miraial Co., Ltd.

Title:

Substrate stowage container

Document Type and Number:

Japanese Patent JP6030758

Kind Code:

B2

Abstract:

A handling member includes: a substantially plate-like handling member main body that is arranged along a pair of the side walls, respectively; a circular position-restriction through hole that is formed to extend through the handling member main body in a thickness direction of the handling member and with which the semicircular convex portion can be engaged; a handling member side guided portion that is engaged with the guide members and of which a movement is guided between the mounting position and the detachment position by the guide members; and a back-side guided portion that can be engaged with the back-side engaging portion by a movement of the handling member from the detachment position to the mounting position.

Inventors:

Kanamori Yudai

Application Number:

JP2015519552A

Publication Date:

November 24, 2016

Filing Date:

May 29, 2013

Export Citation:

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