To suck and hold a substrate certainly while the stress generated in the substrate is suppressed.
An outside appearance inspecting device 1 is equipped with three groups 16A-16C of sucking parts secured to a metal plate 15 as a substrate sucking device. The groups 16A-16C are arranged in the transporting direction of a glass substrate W, and each group includes three sucking parts 18A-18C. The sucking parts 18A-18C are furnished each with a suction pad 22 to be sucked to the reverse surface of the glass substrate W and making swinging its head. The sucking part 18B of the group 16B located most in the middle is furnished with a pressing part 33 in the over-part. The pressing part 33 moves an auxiliary pad 35 downward and presses the glass substrate W to the sucking part 18B.
| WO2004100254A1 | 2004-11-18 |
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Tadao Takashiba
Hiroshi Masui