Title:
SUBSTRATE SUPPLY SYSTEM
Document Type and Number:
Japanese Patent JP2001206541
Kind Code:
A
Abstract:
To provide an inexpensive substrate supply system capable of supplying a substrate to a working device in a short period of time.
This substrate supply system is furnished with a main carrier passage 1 to carry a substrate 100, sub carrier passages 11a, 11b, 11c to carry the substrate 100 to an access position A free to pick it up by carrier robots 21a, 21b, 21c arranged in the neighbourhood of a working device from the main carrier passage 1 and a retreating mechanism arranged at the access position A of the sub carrier passages and to retreat an unworked substrate and a worked substrate in the vertical direction.
Inventors:
SATOI YASUNAGA
Application Number:
JP2000014837A
Publication Date:
July 31, 2001
Filing Date:
January 24, 2000
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/677; B65G49/05; H01L21/68; (IPC1-7): B65G49/05; H01L21/68
Attorney, Agent or Firm:
Yasunori Otsuka (1 person outside)