Title:
ジェットによる基板表面の仕上げ装置
Document Type and Number:
Japanese Patent JP5009356
Kind Code:
B2
Abstract:
Jet-induced finishing of a substrate surface includes means for covering the surface with an abrasive liquid slurry and means for impinging a jet of fluid, either a gas or a liquid, against the slurry to create a high-shear work zone on the substrate surface whereby portions of the substrate are lifted and removed to alter the shape of the surface towards a predetermined shape and/or smoothness. The surface may be covered as by cascading a flowing layer of slurry over it or by impinging slurry onto the work zone or by immersing the substrate in a pool of the slurry. A nozzle for dispensing the jet fluid is precisely located at a predetermined distance and angle from the surface to be finished. A coarse removal function is provided by disposing the nozzle tip at a first distance from the substrate surface, and a fine removal function is provided by disposing the nozzle closer to the substrate surface. The invention is generally useful for finishing optical elements, and especially for inexpensive forming of microlenses.
Inventors:
Cordonsky, William
Sequeles, Arpad
Sequeles, Arpad
Application Number:
JP2009287496A
Publication Date:
August 22, 2012
Filing Date:
December 18, 2009
Export Citation:
Assignee:
QEE Technologies International Incorporated
International Classes:
B24B31/00; B24C5/02; B24B13/00; B24B37/00; B24C1/00; B24C3/22
Domestic Patent References:
| JP2262962A | ||||
| JP11123661A | ||||
| JP7001398A | ||||
| JP5057615A | ||||
| JP2000280160A | ||||
| JP2000169993A |
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shigeru Sakuma
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shigeru Sakuma