Title:
基板熱処理装置
Document Type and Number:
Japanese Patent JP3979764
Kind Code:
B2
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Inventors:
Masao Tsuji
Yoshimitsu Fukutomi
Yoshimitsu Fukutomi
Application Number:
JP2000130321A
Publication Date:
September 19, 2007
Filing Date:
April 28, 2000
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
F25D9/00; H01L21/683; F24F5/00; F27D5/00; F27D9/00; H01L21/027; H01L21/68
Domestic Patent References:
| JP10041375A | ||||
| JP10064985A | ||||
| JP9157846A | ||||
| JP10339591A |
Attorney, Agent or Firm:
Tsutomu Sugiya