Title:
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS USING THE SUBSTRATE TRANSFER APPARATUS
Document Type and Number:
Japanese Patent JP3938436
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus, which can efficiently transfer substrates according to the number of substrates and also to provide a substrate processing apparatus using the transfer apparatus.
SOLUTION: A horizontal transfer robot 200 can be exchanged by removing and attaching single-wafer hands 260a and 260b for holding a single sheet of W to a third arm 225 as well as a batch hand 250, for collectively holding a plurality of sheets of substrates W thereto. When the plural sheets of substrates W are collectively transferred between a carrier C and an attitude conversion mechanism 300, the substrates are transferred by the batch hand 250. When the substrates W are transferred one by one therebetween or when the substrates W are rearranged within the carrier C or within the attitude conversion mechanism 300, the substrates W are transferred one by one by the single-wafer hands 260a and 260b.
Inventors:
Ichiro Mitsuyoshi
Application Number:
JP15793098A
Publication Date:
June 27, 2007
Filing Date:
June 05, 1998
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/677; H01L21/304; H01L21/68; (IPC1-7): H01L21/68; H01L21/304
Domestic Patent References:
| JP4106952A | ||||
| JP7106402A | ||||
| JP2168644A | ||||
| JP7297256A |
Attorney, Agent or Firm:
Shigeaki Yoshida
Yoshitake Hidetoshi
Takahiro Arita
Yoshitake Hidetoshi
Takahiro Arita
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