Title:
基板搬送装置およびこの基板搬送装置を備えた基板処理装置
Document Type and Number:
Japanese Patent JP7198039
Kind Code:
B2
Abstract:
To provide a substrate conveying device and a substrate processing apparatus capable of appropriately conveying a substrate even when conveying the substrate having a large warpage.SOLUTION: The substrate conveying device includes: a plurality of lower rollers 11 connected to a lower drive shaft 10 at positions in the vicinity of both ends of a substrate 100, and conveying the substrate 100 by being rotated in contact with a lower surface of the substrate 100; a pair of flange-shaped rollers 12 connected to the lower drive shaft 10 at positions outside both ends of the substrate 100; and a plurality of upper rollers 21 connected via an elevating mechanism 22 to an upper drive shaft 20 at positions above the vicinity of both ends of the substrate 100 and above a part of the lower rollers 11.SELECTED DRAWING: Figure 9
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Inventors:
Kazuo Age
Application Number:
JP2018198304A
Publication Date:
December 28, 2022
Filing Date:
October 22, 2018
Export Citation:
Assignee:
SCREEN Febax Co., Ltd.
International Classes:
B65G13/04; B65G49/07; H01L21/677
Domestic Patent References:
| JP2008028394A | ||||
| JP2003086654A | ||||
| JP3056810U | ||||
| JP4243717A |
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita
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