Title:
SUBSTRATE TRANSFER ROBOT
Document Type and Number:
Japanese Patent JP2011156654
Kind Code:
A
Abstract:
To provide a substrate transfer robot for safely transferring a substrate without damaging the surface of the substrate during the transfer of the glass substrate.
The substrate transfer robot for safely transferring the substrate without damaging the surface of the substrate during the transfer of the glass substrate includes: a robot arm (10) for transferring the substrate (11); floating portions (20) for floating the substrate (11) from the robot arm (10); and a substrate support portion (30) installed on the robot arm (10) so as to support the weight of the substrate (11).
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Inventors:
PARK SANG YOUNG
CHA YOU MIN
JUNG WON-WOONG
ROH YOUN-GOO
MUN JU EEL
CHA YOU MIN
JUNG WON-WOONG
ROH YOUN-GOO
MUN JU EEL
Application Number:
JP2010177559A
Publication Date:
August 18, 2011
Filing Date:
August 06, 2010
Export Citation:
Assignee:
SAMSUNG MOBILE DISPLAY CO LTD
International Classes:
B25J15/08; B65G49/06; H01L21/677
Attorney, Agent or Firm:
IPD International Patent Business Corporation
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