Title:
SUBSTRATE TRANSFER SYSTEM
Document Type and Number:
Japanese Patent JP3934191
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a substrate transfer system in which efficiency of substrate transfer processing is enhanced while preventing the substrate from being shifted.
SOLUTION: A drive control means C controls a drive means R based on the control conditions of transfer speed and transfer acceleration being set for respective chambers PC1, PC2, PC3 to move a substrate holding means T holding a substrate W thus transferring the substrate W with respect to a chamber. Consequently, the substrate W is prevented from being shifted by setting a transfer speed and a transfer acceleration causing no shift of the substrate W. Furthermore, the time required for transfer processing can be shortened by setting the transfer speed and the transfer acceleration within a range causing no shift of the substrate W.
Inventors:
Takatoshi Masatoshi
Tsuyoshi Kawashita
Tsuyoshi Kawashita
Application Number:
JP35408796A
Publication Date:
June 20, 2007
Filing Date:
December 18, 1996
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
B65G49/07; H01L21/677; H01L21/02; H01L21/68; (IPC1-7): H01L21/68; B65G49/07; H01L21/02
Domestic Patent References:
| JP8222618A | ||||
| JP7307373A |
Attorney, Agent or Firm:
Tatsuo Moriyama
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